The developed photolithography-based fabrication technology may be applied to produce microactuators and microsensors suitable for numerous applications, e.g. telecom, automotive, medical, measurement and various industrial equipment.
This surface micromachining technology uses a combination of different thin film deposition and etching processes such as wet and reactive ion etching, electron-beam vacuum evaporation, electroplating, etc. The technology was successfully implemented for fabrication of electrostatic microrelays and micromotors.
Available technological infrastructure enables small-batch fabrication as well as electric and dynamic characterization of MEMS transducers.