Micromechanical Electrostatic Relay

Elektronika

It is a micro-scale device with lateral dimensions in the range of tens to hundreds of micrometers; thickness of the microcantilever is about 2.0 µm; contact gap is smaller than 1.5 µm.

Novelty:

In order to strengthen attachment of the microcantilever to the substrate, stepped pyramid-shaped fractal microstructures with high effective surface area formed in the anchor region during fabrication process, which results in improved device reliability.

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