It is a micro-scale device with lateral dimensions in the range of tens to hundreds of micrometers; thickness of the microcantilever is about 2.0 µm; contact gap is smaller than 1.5 µm.
Novelty:
In order to strengthen attachment of the microcantilever to the substrate, stepped pyramid-shaped fractal microstructures with high effective surface area formed in the anchor region during fabrication process, which results in improved device reliability.
